{"id":18550,"date":"2017-11-13T08:44:54","date_gmt":"2017-11-13T08:44:54","guid":{"rendered":"https:\/\/www.mcctcarbide.com\/application-of-ebsd-in-materials-research\/"},"modified":"2020-05-08T01:56:38","modified_gmt":"2020-05-08T01:56:38","slug":"application-of-ebsd-in-materials-research","status":"publish","type":"post","link":"https:\/\/www.meetyoucarbide.com\/ko\/ebsd-in-materials-research%ec%9d%98-%ec%9d%91%ec%9a%a9\/","title":{"rendered":"\uc7ac\ub8cc \uc5f0\uad6c\uc5d0 EBSD \uc801\uc6a9"},"content":{"rendered":"<div class=\"vgblk-rw-wrapper limit-wrapper\">1 \uba38\ub9ac\ub9d0 \uc804\uc790 \ud6c4\ubc29\uc0b0\ub780 \ud68c\uc808(EBSD)\uc758 \uc5ed\uc0ac\ub294 1928\ub144\uc5d0 Kikuchi\uac00 \ud22c\uacfc\ud615 \uc804\uc790\ud604\ubbf8\uacbd\uc73c\ub85c \uad00\ucc30\ud55c \ub760 \ubaa8\uc591\uc758 \ud68c\uc808 \ud328\ud134\uc73c\ub85c \uac70\uc2ac\ub7ec \uc62c\ub77c\uac00\uc57c \ud569\ub2c8\ub2e4. 1954\ub144\uae4c\uc9c0 Alam, Blackman \ubc0f Pashley\ub294 \ud22c\uacfc \uc804\uc790 \ud604\ubbf8\uacbd\uc744 \uc0ac\uc6a9\ud558\uc5ec \ucd5c\ucd08\uc758 \uc5c4\uaca9\ud55c \uc804\uc790 \ud6c4\ubc29 \uc0b0\ub780 \ud68c\uc808\uc778 \ud544\ub984\uc5d0\uc11c LiF, KI, NaCl, PbS2 \uacb0\uc815\uc744 \uc808\ub2e8\ud558\ub294 \uad11\uac01 \ud0a4\ucfe0\uce58 \ud328\ud134\uc744 \ud544\ub984\ud654\ud588\uc2b5\ub2c8\ub2e4. 1973\ub144 Venables\uc640 Harland\ub294 \uc8fc\uc0ac \uc804\uc790 \ud604\ubbf8\uacbd\uc5d0\uc11c \uc804\uc790 \ud6c4\ubc29 \uc0b0\ub780 \ud68c\uc808 \ud328\ud134\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc7ac\ub8cc\uc5d0 \ub300\ud55c \uacb0\uc815\ud559\uc801 \uc5f0\uad6c\ub97c \uc218\ud589\ud558\uc5ec \uc7ac\ub8cc \uacfc\ud559\uc5d0 EBSD\ub97c \uc801\uc6a9\ud560 \uc218 \uc788\uac8c \ub418\uc5c8\uc2b5\ub2c8\ub2e4. 1980\ub144\ub300 \ud6c4\ubc18\uc5d0 Dingley\ub294 \uc804\uc790 \ud6c4\ubc29 \uc0b0\ub780 \ud68c\uc808 \ud328\ud134\uc744 \uc218\uc2e0\ud558\uace0 \ud68d\ub4dd\ud558\uae30 \uc704\ud574 \uc2a4\ud06c\ub9b0\uacfc \ud154\ub808\ube44\uc804 \uce74\uba54\ub77c\ub97c \uc0ac\uc6a9\ud588\uc2b5\ub2c8\ub2e4. 1990\ub144\ub300\uc5d0\ub294 \uc790\ub3d9 \ud328\ud130\ub2dd\uc774 \uc774\ub8e8\uc5b4\uc84c\uc2b5\ub2c8\ub2e4. \ub514\uc9c0\ud138 \uce74\uba54\ub77c, \ucef4\ud4e8\ud130 \ubc0f \uc18c\ud504\ud2b8\uc6e8\uc5b4\uc758 \uae09\uc18d\ud55c \ubc1c\uc804\uc73c\ub85c \ud604\uc7ac \uc81c\ud488 EBSD\ub294 \ud328\ud134 \uc218\uc2e0 \ubc0f \uc218\uc9d1\uc5d0\uc11c \uad50\uc815\uc5d0 \uc774\ub974\uae30\uae4c\uc9c0 \uc644\uc804\ud55c \uc790\ub3d9\ud654\ub97c \uc2e4\ud604\ud588\uc2b5\ub2c8\ub2e4. \uc9c0\uc9c8\ud559, \ub9c8\uc774\ud06c\ub85c\uc77c\ub809\ud2b8\ub85c\ub2c9\uc2a4, \uc7ac\ub8cc \uacfc\ud559 \ub4f1\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 Kikuchi \ud328\ud134 \ubc0f \ubcf4\uc815 \uacb0\uacfc\ub97c \ucd08\ub2f9 100\uac1c \uc774\uc0c1 \uc5bb\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4.2 EBSD\uc758 \ud615\uc131 \uc6d0\ub9ac\uc640 \uadf8 \ubb3c\ub9ac\uc801 \uc758\ubbf8 \uc804\uc790 \ud6c4\ubc29 \uc0b0\ub780 \ud68c\uc808\uacc4\ub294 \uc77c\ubc18\uc801\uc73c\ub85c SEM \ub610\ub294 \uc804\uc790 \ud504\ub85c\ube0c\uc5d0 \uc124\uce58\ub429\ub2c8\ub2e4. \uc0d8\ud50c \ud45c\uba74\uacfc \uc218\ud3c9\uc740 \uc57d 70 \u00b0\uc785\ub2c8\ub2e4. \uc785\uc0ac \uc804\uc790\ube54\uc774 \uc0d8\ud50c\uc5d0 \ub4e4\uc5b4\uac00\uba74 \uc0d8\ud50c\uc758 \uc6d0\uc790\uc5d0 \uc758\ud574 \uc0b0\ub780\ub429\ub2c8\ub2e4. \uc804\uc790\uc758 \uc0c1\ub2f9 \ubd80\ubd84\uc740 \uc0b0\ub780 \uac01\ub3c4\ub85c \uc778\ud574 \uc0d8\ud50c \ud45c\uba74\uc744 \ube60\uc838 \ub098\uc635\ub2c8\ub2e4. \uc804\uc790\uc758 \uc774 \ubd80\ubd84\uc744 \ud6c4\ubc29 \uc0b0\ub780 \uc804\uc790\ub77c\uace0 \ud569\ub2c8\ub2e4. \uacb0\uc815\uba74\uc758 \uc0d8\ud50c \ud328\ubc00\ub9ac\ub97c \uac00\uc9c4 \uc0d8\ud50c\uc744 \ub5a0\ub098\ub294 \uacfc\uc815\uc5d0\uc11c \ud6c4\ubc29 \uc0b0\ub780\ub41c \uc804\uc790\ub294 \ube0c\ub798\uadf8 \ud68c\uc808 \uc870\uac74\uc744 \ucda9\uc871\ud569\ub2c8\ub2e4. \ud45c\uba74, 2\uac1c\uc758 \uc6d0\ubfd4\ud615 \ud45c\uba74\uacfc \ubc1d\uc740 \ubc34\ub4dc\uc758 \ub2e8\uba74 \ud615\uc131 \ud6c4 \uc218\uc2e0 \uc2a4\ud06c\ub9b0, Kikuchi \ubc34\ub4dc. \uac01 \ud0a4\ucfe0\uce58 \uc874\uc758 \uc911\uc2ec\uc120\uc740 \ub3c4 4\uc5d0 \ub3c4\uc2dc\ub41c \ubc14\uc640 \uac19\uc774 \uc2dc\ub8cc \uc0c1\uc758 \uc804\uc790\uc758 \uc0b0\ub780\uc810\uacfc \uc218\uc2e0 \uc2a4\ud06c\ub9b0\uc73c\ub85c\ubd80\ud130 \ube0c\ub798\uadf8 \ud68c\uc808\uc774 \ubc1c\uc0dd\ud558\ub294 \ud3c9\uba74\uc758 \ub2e8\uba74\uc5d0 \ud574\ub2f9\ud55c\ub2e4. 1. \uc804\uc790 \ud6c4\ubc29 \uc0b0\ub780 \ud68c\uc808 \ud328\ud134\uc744 \uc804\uc790 \ud6c4\ubc29 \uc0b0\ub780 \ud68c\uc808 \ud328\ud134(EBSP)\uc774\ub77c\uace0 \ud569\ub2c8\ub2e4. EBSP\ub294 \uc885\uc885 \ud558\ub098 \uc774\uc0c1\uc758 Kikuchi \ubc34\ub4dc\ub97c \ud3ec\ud568\ud569\ub2c8\ub2e4. \uc218\uc2e0 \ud654\uba74 \uc218\uc2e0 EBSP CCD \ub514\uc9c0\ud138 \uce74\uba54\ub77c\ub85c \ub514\uc9c0\ud138\ud654\ub418\uc5b4 \ubcf4\uc815 \ubc0f \uacc4\uc0b0\uc744 \uc704\ud574 \ucef4\ud4e8\ud130\ub85c \uc804\uc1a1\ub429\ub2c8\ub2e4. EBSP\uac00 \uc0d8\ud50c \ud45c\uba74 \uc544\ub798 \uc218\uc2ed \ub098\ub178\ubbf8\ud130\uc758 \uc587\uc740 \uce35\uc5d0\uc11c \ub098\uc628\ub2e4\ub294 \uc810\uc740 \uc8fc\ubaa9\ud560 \uac00\uce58\uac00 \uc788\uc2b5\ub2c8\ub2e4. \ub354 \uae4a\uc740 \uc804\uc790\ub294 \ube0c\ub798\uadf8 \ud68c\uc808\ub3c4 \ubc1c\uc0dd\ud560 \uc218 \uc788\uc9c0\ub9cc \uc6d0\uc790\uc5d0 \uc758\ud574 \ub354 \uc0b0\ub780\ub418\uc5b4 \uc0d8\ud50c \ud45c\uba74\uc744 \ub354 \ub098\uac08 \ub54c \uc6b4\ub3d9 \ubc29\ud5a5\uc744 \ubcc0\uacbd\ud558\uc5ec \uacb0\uad6d EBSP\uc758 \ub4b7\uba74\uc774 \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \uc804\uc790 \ud6c4\ubc29 \uc0b0\ub780 \ud68c\uc808\uc740 \ud45c\uba74 \ubd84\uc11d \ubc29\ubc95\uc785\ub2c8\ub2e4. \ub458\uc9f8, \uc0d8\ud50c\uc774 \uc57d 70\u00b0 \uae30\uc6b8\uc5b4\uc9c4 \uc774\uc720\ub294 \uae30\uc6b8\uae30 \uac01\ub3c4\uac00 \ud074\uc218\ub85d \ud6c4\ubc29 \uc0b0\ub780 \uc804\uc790\uac00 \ub354 \ub9ce\uc774 \ud615\uc131\ub418\uace0 EBSP \ud328\ud134\uc774 \ub354 \uac15\ud558\uac8c \ud615\uc131\ub418\uae30 \ub54c\ubb38\uc774\ub2e4. \uadf8\ub7ec\ub098 \uae30\uc6b8\uae30 \uac01\ub3c4\uac00 \ud06c\uba74 \uc0d8\ud50c \ud45c\uba74\uc5d0 \uc804\uc790\ube54 \uc704\uce58\uac00 \uc9c0\uc815\ub418\uc5b4 \uc0d8\ud50c\uc774 \uc81c\ud488 \ud45c\uba74\uc758 \uacf5\uac04 \ubd84\ud574\ub2a5 \ubc0f \uae30\ud0c0 \ubd80\uc815\uc801\uc778 \uc601\ud5a5\uc744 \uc904\uc77c \uc218 \uc5c6\uc73c\ubbc0\ub85c \uc774\uc81c EBSD\uac00 \uc0d8\ud50c\uc744 \uc57d 70\u00b0 \uae30\uc6b8\uc785\ub2c8\ub2e4. \uadf8\ub9bc 1 EBSD \ud615\uc131 \uc6d0\ub9ac\uc804\uc790 \ud6c4\ubc29 \uc0b0\ub780 \ud68c\uc808 \ud328\ud134\uc5d0\ub294 4\uac00\uc9c0 \uc0d8\ud50c \uad00\ub828 \uc815\ubcf4\uac00 \ud3ec\ud568\ub429\ub2c8\ub2e4. \uacb0\uc815 \ubc29\ud5a5 \uc815\ubcf4; \ud06c\ub9ac\uc2a4\ud0c8 \ubb34\uacb0\uc131 \uc815\ubcf4; \uaca9\uc790 \uc0c1\uc218 \uc815\ubcf4. \uadf8\ub9bc 2\ub294 \uc800\uc790\uac00 \uc5bb\uc740 \uc77c\ubc18\uc801\uc778 EBSP \ud328\ud134\uc744 \ubcf4\uc5ec\uc90d\ub2c8\ub2e4. \uc774 \ud328\ud134\uc5d0\ub294 \uc11c\ub85c \ub2e4\ub978 \uacb0\uc815\uba74\uc5d0 \ud574\ub2f9\ud558\ub294 \uc5ec\ub7ec Kikuchi \ubc34\ub4dc\uac00 \ud3ec\ud568\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4. \uad6c\uc870 \uc778\uc790\uac00 0\uc774 \uc544\ub2cc \uacb0\uc815 \uacc4\uc5f4\ub9cc Bragg \ud68c\uc808\uc744 \uac70\uccd0 Kikuchi \ubc34\ub4dc\ub97c \ud615\uc131\ud558\ub294 \ubc18\uba74 \uad6c\uc870 \uc778\uc790\uac00 0\uc778 \uacb0\uc815 \uacc4\uc5f4\uc740 \ud68c\uc808 \uac15\ub3c4\uac00 0\uc774\uae30 \ub54c\ubb38\uc5d0 Kikuchi \ubc34\ub4dc\ub97c \ud615\uc131\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. Kikuchi \ub2e4\ub978 Kikuchi\ub294 Kikuchi\uc758 \ud615\uc131\uacfc \uad50\ucc28\ud569\ub2c8\ub2e4. Kikuchi\ub294 \uc218\uc815\uba74\uad70\uc5d0 \ud574\ub2f9\ud558\ubbc0\ub85c Kikuchi\ub294 \uac01 Kikuchi \ubc34\ub4dc\uc5d0 \ud574\ub2f9\ud558\ub294 \uac01 \uc218\uc815\uad70\uc758 \uacf5\ud1b5 \ubc29\ud5a5, \uc989 \uc218\uc815\ucd95 \ubc29\ud5a5\uc5d0 \ud574\ub2f9\ud569\ub2c8\ub2e4. \uadf8\ub9bc 2\uc5d0\uc11c \ubcfc \uc218 \uc788\ub4ef\uc774 Kikuchi\ub294 \ub9e4\uc6b0 \ud68c\uc804 \ub300\uce6d\uc785\ub2c8\ub2e4. \uc774 \ud68c\uc804 \ub300\uce6d\uc740 \uacb0\uc815 \uad6c\uc870\uc758 \ub300\uce6d\uacfc \uc9c1\uc811\uc801\uc778 \uad00\ub828\uc774 \uc788\uc2b5\ub2c8\ub2e4. \uad6c\uccb4\uc801\uc73c\ub85c, \ud574\ub2f9 \uacb0\uc815\ucd95\uc5d0 \ub300\uc751\ud558\ub294 \ud68c\uc804 \ub300\uce6d\uc740 \uc911\uc2ec \ub300\uce6d, \uc989 2-\ud68c\uc804 \ub300\uce6d\uc744 \ucd94\uac00\ud55c\ub2e4. \uc785\ubc29 \uacb0\uc815 [111] \ubc29\ud5a5 3 \ud68c\uc804 \ub300\uce6d \ubc0f EBSP \ud328\ud134 [111] \ud0a4\ucfe0\uce58 \ub9e4\uc6b0 6 \ub300\uce6d \ub4f1. \uacb0\uc815 \uad6c\uc870\uc758 \ub300\uce6d\uc740 230\uac00\uc9c0 \uc885\ub958\uc758 \uacf5\uac04\uad70\uc73c\ub85c \ub098\ub20c \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ube0c\ub798\uadf8 \ud68c\uc808\uc5d0 \uc758\ud574 \ud615\uc131\ub41c \uc804\uc790 \ud6c4\ubc29 \uc0b0\ub780 \ud68c\uc808 \ud328\ud134\uc740 (h, k, l) \ubc0f (-h, -k, -l)\uc758 \ub3d9\uc77c\ud55c \uad6c\uc870 \uc778\uc790\ub85c \uc778\ud574 \uacf5\uac04\uad70\uc5d0\uc11c \ub300\uce6d\uc801\uc778 \uc791\ub3d9 \uc131\ubd84\uacfc \ub3d9\uc77c\ud55c \ud68c\uc808 \uac15\ub3c4\ub97c \uad6c\ubcc4\ud560 \uc218 \uc5c6\uc74c \ub450 \ubc88\uc9f8 \ud68c\uc804 \ub300\uce6d\uc758 \ub3c4\uc785, EBSP\ub294 32\uac00\uc9c0 \ud3ec\uc778\ud2b8 \uadf8\ub8f9\uc744 \uad6c\ubcc4\ud560 \uc218 \uc5c6\uc73c\uba70 11\ub77c\uc6b0\uc5d0 \uadf8\ub8f9\uc758 \ub450 \uac00\uc9c0 \ud68c\uc804 \ub300\uce6d\ub9cc \uad6c\ubcc4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc989, EBSP \ud328\ud134\uc740 11\uac1c\uc758 \ub2e4\ub978 \ud68c\uc804 \ub300\uce6d\ub9cc \uac00\uc9c8 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\ub9bc 2 Ni \uc77c\ubc18\uc801\uc778 EBSP \ud328\ud134 \uc704\uc5d0\uc11c \uc5b8\uae09\ud588\ub4ef\uc774 \uac01 Kikuchi \uc601\uc5ed\uc758 \uc911\uc2ec\uc120\uc740 \uc0d8\ud50c\uc758 \ud574\ub2f9 \uacb0\uc815 \ud45c\uba74 \ud6c4 \uc218\uc2e0 \uc2a4\ud06c\ub9b0\uc758 \ub2e8\uba74\uc120\uacfc \ub3d9\uc77c\ud569\ub2c8\ub2e4. \uc804\uc790\ube54\uc774 \uc870\uc0ac\ub429\ub2c8\ub2e4. \uac01 Kikuchi \uc804\uadf9\uc740 \uc804\uc790\ube54 \uc870\uc0ac\uc5d0\uc11c \ud574\ub2f9 \uacb0\uc815\uba74\uc758 \ud655\uc7a5\uc5d0 \ud574\ub2f9\ud558\uace0 \uc218\uc6a9 \uc2a4\ud06c\ub9b0\uc740 \ucc28\ub2e8\uc5d0 \uc758\ud574 \ud615\uc131\ub418\ubbc0\ub85c EBSP\uc5d0\ub294 \uc0d8\ud50c\uc758 \uacb0\uc815\ud559\uc801 \ubc29\ud5a5 \uc815\ubcf4\uac00 \ud3ec\ud568\ub429\ub2c8\ub2e4. \uc0d8\ud50c\uc758 \uacb0\uc815 \ubc29\ud5a5\uc740 \uc0d8\ud50c \ubc30\uce58, \uc785\uc0ac \uc804\uc790\ube54\uc758 \uc704\uce58 \ubc0f \uc218\uc2e0 \uc2a4\ud06c\ub9b0\uc758 \uae30\ud558\ud559 \uc870\uac74\uc5d0\uc11c \ub2e8\uc77c \ud0a4\ucfe0\uce58 \ub610\ub294 \ud2b8\ub9ac\ud50c \ud0a4\ucfe0\uce58 \ubc29\ubc95\uc73c\ub85c \uacc4\uc0b0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uaca9\uc790\uc758 \ubb34\uacb0\uc131\uc740 \ubd84\uba85\ud788 EBSP \ud328\ud134\uc758 \ud488\uc9c8. \uacb0\uc815 \uaca9\uc790\uac00 \uc190\uc0c1\ub418\uc9c0 \uc54a\uc740 \uacbd\uc6b0 \ud615\uc131\ub41c EBSP \ud328\ud134\uc5d0\uc11c Kikuchi \ubc34\ub4dc\uc758 \uac00\uc7a5\uc790\ub9ac\uac00 \ub0a0\uce74\ub85c\uc6b0\uba70 \uace0\ucc28 \ud68c\uc808\ub3c4 \uad00\ucc30\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4(\ub3c4 2 \ucc38\uc870). \uaca9\uc790\uac00 \uc2ec\ud55c \ubcc0\ud615\uc744 \uc77c\uc73c\ud0a4\uace0 \uacb0\uc815 \uaca9\uc790\uc758 \uc65c\uace1 \ubc0f \uc65c\uace1\uacfc \uac19\uc740 \uacb0\ud568\uc774 \ubc1c\uc0dd\ud558\uace0 \ub9ce\uc740 \uc804\uc704\uac00 \ubc1c\uc0dd\ud558\uba74 \uac00\uc7a5\uc790\ub9ac\uac00 \ud37c\uc9c0, \ud655\uc0b0\ub429\ub2c8\ub2e4(\uadf8\ub9bc 3). \uadf8 \uc774\uc720\ub294 \ube0c\ub798\uadf8 \ud68c\uc808\uc5d0 \uc758\ud574 \ud615\uc131\ub41c \ud0a4\ucfe0\uce58 \ubc34\ub4dc\uac00 \uc815\ubcf4\uc758 \uc6d0\uc790 \uc8fc\uae30\uc801\uc778 \ubc30\uc5f4\uc744 \ubc18\uc601\ud558\uae30 \ub54c\ubb38\uc785\ub2c8\ub2e4. \uacb0\uc815\uc774 \ub354 \uc644\uc804\ud560\uc218\ub85d \ube0c\ub798\uadf8 \ud68c\uc808 \uac15\ub3c4\uac00 \ub192\uc744\uc218\ub85d \ud0a4\ucfe0\uce58 \ubc34\ub4dc \ud615\uc131\uc758 \uac00\uc7a5\uc790\ub9ac\uac00 \ub354 \ub0a0\uce74\ub85c\uc6cc\uc9d1\ub2c8\ub2e4. \uadf8\ub9bc 3 \ubcc0\ud615\ub41c \ud2f0\ud0c0\ub284 \ud569\uae08 EBSP \ud328\ud134 \uadf8\ub9bc 1\uc5d0\uc11c \ubcfc \uc218 \uc788\ub4ef\uc774 Kikuchi W \uacb0\uc815 \uaca9\uc790 \uac04\uaca9\uc758 \ub108\ube44\uc640 \ud45c\uba74 \uc0ac\uc774\uc758 \ud574\ub2f9 d\ub294 \ub2e4\uc74c \uad00\uacc4\ub97c \uac16\uc2b5\ub2c8\ub2e4. W = R \u00b7 \u03b8 (1)\u03bb = 2dsin\u03b8 (2) \uc5ec\uae30\uc11c R\uc740 \uac70\ub9ac \uc218\uc2e0 \ud654\uba74\uc758 Kikuchi \ub300\uc5ed\uacfc \uc2dc\ub8cc\uc758 \uc804\uc790\ube54 \uc785\uc0ac\uc810 \uc0ac\uc774, \u03bb\ub294 \uc785\uc0ac \uc804\uc790\ube54\uc758 \ud30c\uc7a5\uc785\ub2c8\ub2e4.3 \uc7ac\ub8cc \uc5f0\uad6c\uc758 EBSD3.1 Grain \ubc29\ud5a5, Grain \ubc29\ud5a5 \ubd84\ud3ec(\ubbf8\uc138 \uc870\uc9c1) , \ubc29\ud5a5 \ubc0f \uc2b5\uad00\uc758 \uad00\ub840\uc801 \ud310\ub2e8 EBSD \ud654\uba74\uc5d0\uc11c \uc218\uc2e0\ud55c \ud328\ud134\uc740 CCD \ub514\uc9c0\ud138 \uce74\uba54\ub77c\uc5d0\uc11c \uc218\uc9d1\ub418\uc5b4 \ucef4\ud4e8\ud130\ub85c \uc804\uc1a1\ub429\ub2c8\ub2e4. \ucef4\ud4e8\ud130\ub294 \uac01 Kikuchi \ubc34\ub4dc\uc758 \uc704\uce58\ub97c \uac10\uc9c0\ud558\uae30 \uc704\ud574 Hough \ubcc0\ud658\uc744 \uc218\ud589\ud558\uace0 Kikuchi \ubc34\ub4dc \uc0ac\uc774\uc758 \uac01\ub3c4\ub97c \uacc4\uc0b0\ud569\ub2c8\ub2e4. \uadf8\ub7f0 \ub2e4\uc74c Kikuchi\uc640 Kikuchi\uc758 \uac12\uc744 \ube44\uad50\ud558\ub294 \uac01\ub3c4 \uc774\ub860. \uadf8\ub9bc 4\ub294 \ubcf4\uc815\ub41c EBSP \ud328\ud134\uc744 \ubcf4\uc5ec\uc90d\ub2c8\ub2e4. \uadf8\ub9bc\uc5d0\uc11c &quot;10&quot;\uc740 \uc218\uc2e0 \uc2a4\ud06c\ub9b0\uc758 \uc911\uc559, \uc989 \uc2dc\ub8cc\uc5d0 \uc804\uc790\ube54\uc774 \uc785\uc0ac\ub418\ub294 \uc704\uce58\uc640 \uc2a4\ud06c\ub9b0\uc5d0\uc11c \uc218\uc2e0 \uc2a4\ud06c\ub9b0 \uc218\uc9c1\uc120\uc758 \uad50\ucc28\uc810\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \uc2dc\ub8cc\uc5d0\uc11c \uc804\uc790\ube54\uc758 \uc704\uce58\uac00 \uc2a4\ud06c\ub9b0\uc5d0 \uc218\uc9c1\uc778 \uac83\uc73c\ub85c \uc54c\ub824\uc9c4 \uacbd\uc6b0 \ub2e8\uc77c \ud0a4\ucfe0\uce58 \ub610\ub294 \uc0bc\uc911 \ud0a4\ucfe0\uce58 \ubc29\ubc95\uc744 \uc0ac\uc6a9\ud558\uc5ec \uacb0\uc815\ub9bd\uc758 \uacb0\uc815\ud559\uc801 \ubc29\ud5a5\uc744 \uacc4\uc0b0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud14c\uc2a4\ud2b8 \uc870\uac74\uc744 \uc2e0\uc911\ud558\uac8c \uc124\uc815\ud558\uba74 \uacb0\uc815 \ubc29\ud5a5\uc5d0 \ub300\ud55c EBSD \uacb0\uc815\uc758 \uc808\ub300 \uc815\ud655\ub3c4\uac00 \u2264 0.25\u00b0\uac00 \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc0d8\ud50c\uc758 \uc804\uc790\ube54\uc774 \uc57d\uac04\uc758 EBSP \ud328\ud134\uc5d0 \ub300\ud574 \uc77c\uc815 \uac70\ub9ac\uc5d0 \uc788\uc73c\uba74 \uc0d8\ud50c \ud45c\uba74\uc758 \ud2b9\uc815 \uc601\uc5ed\uc774 \ub9e4\ud551\ub418\uba74 \uac01 \uc785\uc790\uc758 \ub2e4\uacb0\uc815 \uc0d8\ud50c \ubc29\ud5a5\uc744 \uacb0\uc815\ud560 \uc218 \uc788\uc73c\uba70 \ud1b5\uacc4 \uacc4\uc0b0\uc740 \ud1b5\uacc4\uc801 \ubd84\ud3ec\ub97c \uacb0\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uacb0\uc815 \ubc29\ud5a5 - \uc9c8\uac10. CCD \uce74\uba54\ub77c, \ucef4\ud4e8\ud130 \ubc0f \uc18c\ud504\ud2b8\uc6e8\uc5b4\uc758 \uae09\uc18d\ud55c \ubc1c\uc804\uc73c\ub85c \uc778\ud574 \uc0c8\ub85c\uc6b4 EBSD\ub294 EBSP \ud328\ud134\uc744 \ub9e4\uc6b0 \ube60\ub974\uac8c \uce21\uc815\ud558\uace0 \uacb0 \ubc29\ud5a5\uc758 \uacb0\uacfc\ub97c \uc81c\uacf5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4 \uc601\uad6d \uc625\uc2a4\ud3ec\ub4dc\uc758 Crystal\uc740 \ucd08\ub2f9 100\uac1c \uc774\uc0c1\uc758 EBSP \ud328\ud134\uc744 \uc218\uc9d1\ud558\uace0 \ubc29\ud5a5 \uacb0\uacfc\ub97c \uc81c\uacf5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc0d8\ud50c\uc758 \ud55c \uc2dc\uc57c\uc5d0\uc11c \ucd5c\ub300 512 \u00d7 384 \ub3c4\ud2b8\ub97c \uce21\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ubc30\uc728\uc744 \ubcc0\uacbd\ud558\uc5ec mm2\uc5d0\uc11c \u03bcm2 \uc601\uc5ed\uae4c\uc9c0 \uc0d8\ud50c\uc758 \uc9c8\uac10\uc744 \uacb0\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. EBSD\uc758 \uacf5\uac04 \ubd84\ud574\ub2a5\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \uc57d 0.5\u03bcm\uc785\ub2c8\ub2e4. \uc804\uacc4 \ubc29\ucd9c \uc8fc\uc0ac \uc804\uc790 \ud604\ubbf8\uacbd\uc5d0 \uc124\uce58\ud558\uba74 \uacf5\uac04 \ubd84\ud574\ub2a5\uc774 10nm \ubbf8\ub9cc\uc774 \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c nm \uc785\uc790\uc758 \ubc29\ud5a5\uc740 EBSD\ub85c \uacb0\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uace0\ubc30\uc728\uc5d0\uc11c \uce21\uc815\ub41c \ud14d\uc2a4\ucc98\ub97c \uc885\uc885 \ub9c8\uc774\ud06c\ub85c\ub3c4\uba54\uc778\uc774\ub77c\uace0 \ud569\ub2c8\ub2e4. \ub3d9\uc2dc\uc5d0 EBSD\ub294 \ub300\uba74\uc801\uc758 \uac70\uc2dc\uc801 \uc9c8\uac10\uc744 \uce21\uc815\ud558\ub294 \ub370\uc5d0\ub3c4 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc778\uc811\ud55c \uc601\uc5ed\uc758 \uc9c8\uac10\uc744 \uc800\ubc30\uc728\ub85c \uce21\uc815\ud55c \ud6c4 \ubabd\ud0c0\uc8fc \ubc29\ubc95\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc11c\ub85c \ub2e4\ub978 \uc601\uc5ed\uc744 \uc811\ud569\ud558\uc5ec \ub113\uc740 \uc601\uc5ed\uc758 \uc9c8\uac10\uc744 \uc5bb\uc2b5\ub2c8\ub2e4. \uc608\ub97c \ub4e4\uc5b4, HKL\uc0ac\uc758 CHANNAL5\ub294 \uc804\uc790\ud604\ubbf8\uacbd\uc758 \uc790\ub3d9 \uc0d8\ud50c \uc2a4\ud14c\uc774\uc9c0\uc640 \ud611\ub825\ud558\uc5ec 20mm \u00d7 20mm \ubc94\uc704\uc758 \ud14d\uc2a4\ucc98\ub97c \uce21\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\ub9bc 4. \ubcf4\uc815\ub41c Ni EB \ud328\ud134EBSD \ud14d\uc2a4\ucc98\ub294 \uadf9\uc131\uacfc \uac19\uc740 \ub2e4\uc591\ud55c \ud615\ud0dc\ub85c \ud45c\ud604\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc9c0\ub3c4, \uc5ed\uadf9 \uc9c0\ub3c4, ODF \ub4f1(\uadf8\ub9bc 5 \ucc38\uc870). X\uc120 \ud68c\uc808\uacfc \ube44\uad50\ud560 \ub54c EBSD\ub294 \ubbf8\uc138 \uc870\uc9c1, \uc120\ud0dd\ud55c \uc601\uc5ed\uc758 \uc870\uc9c1\uc744 \uce21\uc815\ud558\uace0 \uacb0\uc815\ub9bd \ubaa8\uc591\uc744 \uacb0\uc815\ub9bd \ubc29\ud5a5\uacfc \uc9c1\uc811 \uc5f0\uad00\uc2dc\ud0a4\ub294 \uc774\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4. \ub610\ud55c, X\uc120 \uad6c\uc870\ub294 \ubc18\uc720\ub3c4 \ud6c4 \uacb0\uc815\ub9bd \ubc29\ud5a5\uc758 \ud68c\uc808 \uac15\ub3c4, \uc120\ud0dd\ud55c \uacc4\uc0b0 \ubaa8\ub378\uc5d0 \uc758\ud55c \uacc4\uc0b0 \uc815\ud655\ub3c4, \uc124\uc815\ud55c \ub2e4\uc591\ud55c \ub9e4\uac1c\ubcc0\uc218\uc758 \uc601\ud5a5, \uc77c\ubc18\uc801\uc73c\ub85c \uce21\uc815\ub41c \uc9c8\uac10 \ubc0f \uc2e4\uc81c \ud3b8\ucc28\ub97c \uce21\uc815\ud558\uc5ec \uce21\uc815\ud569\ub2c8\ub2e4. 15% \uc774\uc0c1. EBSD\ub294 \uac01 \uace1\ubb3c \ud1b5\uacc4\uc758 \uc808\ub300 \ubc29\ud5a5\uc744 \uce21\uc815\ud558\uc5ec \uc9c8\uac10\uc744 \uacb0\uc815\ud558\ubbc0\ub85c EBSD\uac00 \uc9c8\uac10\uc744 \uacb0\uc815\ud558\ub294 \uac00\uc7a5 \uc815\ud655\ud55c \uc218\ub2e8\uc774\ub77c\uace0 \uc0dd\uac01\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ubb3c\ub860, X-\uc120, EBSD \uc0d8\ud50c \uc900\ube44 \ubb38\uc81c \ubc0f \uae30\ud0c0 \uacb0\uc810\uacfc \ube44\uad50\ud560 \ub54c. EBSD\uc5d0 \uc758\ud55c \ub450 \uc0c1\uc758 \uacb0\uc815\ud559\uc801 \ubc30\ud5a5\uc758 \ub3d9\uc2dc \uacb0\uc815\uc740 \ub450 \uc0c1 \uc0ac\uc774\uc758 \uacb0\uc815\ud559\uc801 \uad00\uacc4\uc758 \uacb0\uc815\uc744 \ud5c8\uc6a9\ud569\ub2c8\ub2e4. \ub450 \uc0c1\uc758 \uacb0\uc815\ud559\uc801 \uad00\uacc4\ub97c \uacb0\uc815\ud558\uae30 \uc704\ud574\uc11c\ub294 \uc77c\ubc18\uc801\uc73c\ub85c 30\uac1c \uc774\uc0c1\uc758 \uc704\uce58\uc5d0\uc11c \ub450 \uc0c1\uc758 \uac01\uac01\uc758 \uacb0\uc815\ud559\uc801 \ubc30\ud5a5\uc744 \uacb0\uc815\ud558\ub294 \uac83\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \uadf8\ub9ac\uace0 \ub3d9\uc2dc\uc5d0 \ubaa8\ub4e0 \uce21\uc815 \uacb0\uacfc\ub294 2\uc0c1 \uacb0\uc815\ud559\uc744 \uc124\uc815\ud558\uae30 \uc704\ud574 \ud1b5\uacc4\uc5d0 \ub3d9\uc77c\ud55c \uadf9 \ud22c\uc601 \ubd89\uc740 \uadf8\ub9bc\uc790\uc5d0 \ud22c\uc601\ub429\ub2c8\ub2e4. TEM \ubc0f X-ray\uc640 \ube44\uad50\ud560 \ub54c EBSD\uc5d0 \uc758\ud55c \ub450 \uc704\uc0c1 \uac04\uc758 \ubc30\ud5a5 \uad00\uacc4 \uacb0\uc815\uc740 \ubd84\uba85\ud55c \uc774\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4. EBSD \ud14c\uc2a4\ud2b8\uc5d0 \uc0ac\uc6a9\ub41c \uc0d8\ud50c\uc758 \ud45c\uba74\uc740 \ud3c9\ud3c9\ud558\uace0 \uade0\uc77c\ud558\uba70 \ub450 \uc0c1\uc774 \uacf5\uc874\ud558\ub294 30\uac1c \uc774\uc0c1\uc758 \uc704\uce58\ub97c \uc27d\uac8c \ucc3e\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub3d9\uc2dc\uc5d0 \uacb0\uc815\ub9bd \ubc29\ud5a5\uc740 \uc18c\ud504\ud2b8\uc6e8\uc5b4\uc5d0 \uc758\ud574 \uc790\ub3d9\uc73c\ub85c \uacc4\uc0b0\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud22c\uacfc\uc804\uc790\ud604\ubbf8\uacbd\uc740 \uc2dc\ub8cc\uac00 \uc587\uae30 \ub54c\ubb38\uc5d0 \ub3d9\uc77c\ud55c \uc2dc\ub8cc\uc5d0\uc11c 30\uac1c \uc774\uc0c1\uc758 2\uc0c1 \uc704\uce58 \uacf5\uc874\uc744 \ucc3e\uae30 \uc5b4\ub835\ub2e4. \ub610\ud55c \uacb0 \ubc29\ud5a5\uc740 \uc218\ub3d9\uc73c\ub85c \uacc4\uc0b0\ud574\uc57c \ud569\ub2c8\ub2e4. \uc5d1\uc2a4\uc120\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \ucd2c\uc601 \uc7a5\uce58\uac00 \uc5c6\uae30 \ub54c\ubb38\uc5d0 \uce21\uc815\ub41c \uc704\uce58\uc5d0\uc11c \uc5d1\uc2a4\uc120\uc758 \uc704\uce58\ub97c \uc815\ud655\ud788 \ucc3e\uae30\uac00 \uc5b4\ub835\uc2b5\ub2c8\ub2e4. \uc704\uc0c1 \ud06c\uae30\uac00 \uc791\uc73c\uba74 X-\uc120\uc73c\ub85c \uc0c1\uac04 \uacb0\uc815 \uad00\uacc4\ub97c \uacb0\uc815\ud558\uae30 \uc5b4\ub835\ub2e4. \uadf8\ub9bc 5 \uace0\uc21c\ub3c4 Ni \uae30\uc800\ub300 \uadf9\uc131 \ubc0f \uc5ed\uadf9 \uadf8\ub9bc \ub610\ud55c \uc544\ube44\ud22c\uc2a4, \uc30d\uba74, \uc2ac\ub9bd\uba74 \ub4f1 \uc0ac\uc774\uc758 \ub450 \ubc88\uc9f8 \ub2e8\uacc4\uc640 \uae30\ud310\uc740 \uc0d8\ud50c \ud45c\uba74\uc5d0 \ud754\uc801\uc744 \ub0a8\uae41\ub2c8\ub2e4. \ud2b9\ud788 \ub450 \uac1c \uc774\uc0c1\uc758 \ub2e4\uc774 \ud45c\uba74\uc5d0 \ud754\uc801\uc774 \ub0a8\uc544 \uc788\ub294 \uacbd\uc6b0 EBSD\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc774\ub7ec\ud55c \ud3c9\uba74\uc744 \uacb0\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc704\uc0c1 \uc2dd\ubcc4\uc744 \uc704\ud574\uc11c\ub294 \uce74\uba54\ub77c\uac00 \uc57d\ud55c Kikuchi \uc120\uc744 \uac10\uc9c0\ud558\uae30\uc5d0 \ucda9\ubd84\ud55c \uc218\uc758 \ud68c\uc0c9\uc870\uc640 \ucda9\ubd84\ud788 \ub192\uc740 \uacf5\uac04 \ud574\uc0c1\ub3c4\uac00 \uc788\uc5b4\uc57c \ud569\ub2c8\ub2e4. CCD \uce74\uba54\ub77c\ub294 \uc774\uc81c \uc704\uc0c1 \uc2dd\ubcc4 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\uae30 \uc704\ud574 \uc77c\ubc18\uc801\uc73c\ub85c 12\ube44\ud2b8 \uadf8\ub808\uc774 \uc2a4\ucf00\uc77c, \uc989 212 \uadf8\ub808\uc774 \ub808\ubca8\uacfc \ucd5c\ub300 1300 \u00d7 1024\uc758 \uacf5\uac04 \ud574\uc0c1\ub3c4\ub97c \uac16\uc2b5\ub2c8\ub2e4. EBSD\ub85c \ub2e8\uacc4\ub97c \uc2dd\ubcc4\ud558\ub824\uba74 EDS\uc758 \ub3c4\uc6c0\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \uba3c\uc800 \uc5d0\ub108\uc9c0 \uc2a4\ud399\ud2b8\ub7fc\uc744 \uc0ac\uc6a9\ud558\uc5ec \uad6c\uc131\uc73c\ub85c \uc2dd\ubcc4\ud560 \uc704\uc0c1\uc758 \uc694\uc18c\ub97c \uacb0\uc815\ud55c \ub2e4\uc74c \uc704\uc0c1 EBSP \ud328\ud134\uc744 \uc218\uc9d1\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc694\uc18c\ub85c \ud615\uc131\ub420 \uc218 \uc788\ub294 \ubaa8\ub4e0 \uac1c\uccb4\ub294 \ud328\ud134\uc5d0 \ub300\ud574 \ubcf4\uc815\ub418\uba70 \ud328\ud134\uacfc \uc815\ud655\ud788 \uc77c\uce58\ud558\ub294 \uc704\uc0c1\ub9cc \uc2dd\ubcc4\ub41c \uc704\uc0c1\uc785\ub2c8\ub2e4(\uadf8\ub9bc 6 \ucc38\uc870). EBSD\uc758 \uc704\uc0c1 \uc2dd\ubcc4 \uc6d0\ub9ac\ub294 \ub2e4\uc74c\uacfc \ub2e4\ub985\ub2c8\ub2e4. TEM \ubc0f X\uc120 \ud68c\uc808\uc758 \uc704\uc0c1 \uc2dd\ubcc4. EBSD\ub294 \uc8fc\ub85c \uacb0\uc815\uba74 \uc0ac\uc774\uc758 \uac01\ub3c4\ub97c \uae30\ubc18\uc73c\ub85c \uc704\uc0c1\uc744 \uc2dd\ubcc4\ud558\ub294\ub370, EBSP\ub294 \uc57d 70\u00b0\uc758 \uacb0\uc815 \ubc29\uc704 \uc815\ubcf4\ub97c \ud3ec\ud568\ud558\uace0 TEM\uc740 \uc704\uc0c1\uc744 \uc2dd\ubcc4\ud558\uae30 \uc704\ud574 \uba74\uac04 \uac04\uaca9\uacfc \uacb0\uc815\uac01\uc744 \uae30\ubc18\uc73c\ub85c \ud558\uae30 \ub54c\ubb38\uc5d0 X\uc120\uc740 \uba74\uac04\uc744 \uae30\ubc18\uc73c\ub85c \ud569\ub2c8\ub2e4. \uac04\uaca9 \ubc0f \uac01 \uacb0\uc815\uba74\uc758 \uc0c1\ub300 \ud68c\uc808 \uac15\ub3c4\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc704\uc0c1\uc744 \uc2dd\ubcc4\ud569\ub2c8\ub2e4. X\uc120\uc740 \uba74\uac04 \uac04\uaca9\uc744 \uc815\ud655\ud558\uac8c \uce21\uc815\ud560 \uc218 \uc788\uc73c\ubbc0\ub85c X\uc120 \uc704\uc0c1 \uc2dd\ubcc4\uc5d0\ub294 \uc704\uc0c1 \uad6c\uc131\uc5d0 \ub300\ud55c \uc0ac\uc804 \uc9c0\uc2dd\uc774 \ud544\uc694\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \ubc0f EBSD \ubc0f TEM \uacb0\uc815\uc5d0\uc11c \uba74\uac04 \uac04\uaca9 \uc624\ub958\uac00 \ub354 \ud06c\uba74 \uba3c\uc800 \uc2dd\ubcc4\ud560 \uc704\uc0c1 \uc131\ubd84\uc744 \uacb0\uc815\ud558\uc5ec \ud6c4\ubcf4 \ubc94\uc704\ub97c \uc881\ud600\uc57c \ud569\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \uc138 \uac00\uc9c0 \ud68c\uc808 \ubc29\ubc95\uc740 \ud2b9\uc815 \uacb0\uc815\uba74\uc758 \ud68c\uc808 \uce21\uba74\uc5d0\uc11c \ub3d9\uc77c\ud569\ub2c8\ub2e4. \uc989, \uacb0\uc815\uba74\uc758 \uad6c\uc870\uc801 \uacc4\uc218\uac00 0\uc774 \uc544\ub2c8\uc5b4\uc57c \ud569\ub2c8\ub2e4. \uadf8\ub9bc 6 AlN \ubc0f Cr23C6 \uc2a4\ud14c\uc778\ub9ac\uc2a4\uac15\uc758 EBSP \ubc0f \uad50\uc815 \uacb0\uacfc3 3 EBSD \uc2a4\ud2b8\ub808\uc778 \ubd84\ud3ec \uce21\uc815 \ubc29\ubc953.3.1 EBSD \ud328\ud134 \ud488\uc9c8 \ub2e4\uc774\uc5b4\uadf8\ub7a8 EBSD\uc5d0\uc11c \uac01 \ud68c\uc808 \ud328\ud134\uc740 \uc0e4\ud504\ub2c8\uc2a4\uc5d0 \ub530\ub978 \ud328\ud134 \ud488\uc9c8 \uac12\uc73c\ub85c \ud45c\ud604\ub418\uba70 \ub9e4\ud551\uc5d0 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ubc1d\uc740 \uc810\uc740 \ub192\uc740 \ud328\ud134 \ud488\uc9c8\uc5d0 \ud574\ub2f9\ud558\uace0 \uc5b4\ub450\uc6b4 \uc810\uc740 \ub0ae\uc740 \ud328\ud134 \ud488\uc9c8\uc5d0 \ud574\ub2f9\ud569\ub2c8\ub2e4. \ud488\uc9c8\uc774 \ub0ae\ub2e4\ub294 \uac83\uc740 \uaca9\uc790\uac00 \uc644\uc804\ud558\uc9c0 \uc54a\uace0 \uacb0\ud568 \ubc0f \uae30\ud0c0 \uc804\uc704\uac00 \ub9ce\ub2e4\ub294 \uac83\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4. \ud328\ud134 \ud488\uc9c8 \ub9f5 \ubc29\ubc95\uc740 \ub2e8\uc77c \uc785\uc790\uc758 \ubcc0\ud615\ub960 \ubd84\ud3ec \uce21\uc815\uc5d0 \uc801\ud569\ud558\uba70 \ubcc0\ud615 \uc785\uc790 \ub610\ub294 \ub2e4\ub978 \uacb0\uc815\uc774 \uc5c6\ub294 \uacbd\uc6b0\uc5d0\ub3c4 \uac1c\ubcc4 \uc785\uc790 \ub610\ub294 \ub2e4\ub978 \uacb0\uc815 \ubc29\ud5a5\uc744 \uac16\ub294 \ub2e4\ub978 \uc0c1\uc758 \ubcc0\ud615\ub960 \ubd84\ud3ec \uacb0\uc815\uc5d0\ub294 \uc801\ud569\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \ubc29\ud5a5\uc740 \uac01\uac01 \ub2e4\ub978 \ud328\ud134 \ud488\uc9c8 \uac12\uc744 \uac00\uc9d1\ub2c8\ub2e4.3.3.2 \uacb0\uc815\ub9bd\uacc4 \ubd84\ud3ec\ubcc0\ud615 \uc601\uc5ed\uc5d0\ub294 \ub2e4\uc218\uc758 \uc800\uac01 \uacb0\uc815\ub9bd\uacc4(\uc608: \ubd88\uc77c\uce58 \uc815\ub3c4\uac00 2\u00b0~10\u00b0\uc778 \uacb0\uc815\ub9bd\uacc4)\uac00 \uc788\ub2e4\ub294 \uac83\uc774 \uae30\ubcf8\uc785\ub2c8\ub2e4.3.3. 3 Local mismatch map\uac01 \uce21\uc815 \uc9c0\uc810\uacfc 8\uac1c\uc758 \uc778\uc811 \uc774\uc6c3 \uc0ac\uc774\uc758 \ubd88\uc77c\uce58 \uac01\ub3c4\uc758 \ud3c9\uade0\uc744 \uacc4\uc0b0\ud558\uace0 \ub192\uc740 \uac01\ub3c4\uc758 \uacb0\uc815\ub9bd\uacc4(\uc608: &gt; 5\u00b0 \uacb0\uc815\ub9bd\uacc4)\ub97c \uace0\ub824\ud558\uba74 Grain size.3.3.4 intragranular mismatch diagram \uac01 Grain\ub0b4\uc5d0\uc11c \ubd88\uc77c\uce58 \uac01\ub3c4 \uae30\uc6b8\uae30\uac00 \uac00\uc7a5 \uc791\uc740 \uc810(\uc989, th\uac00 \uc788\ub294 \uc810 e \ucd5c\uc18c \ubcc0\ud615)\uc774 \uacc4\uc0b0\ub429\ub2c8\ub2e4. \uc774 \uc810\uc758 \ubc29\ud5a5\uc744 \uae30\uc900 \ubc29\ud5a5\uc73c\ub85c \ucde8\ud558\uc5ec \uc774 \uc810\uc5d0 \ub300\ud55c \uacb0\uc815\uc758 \ub2e4\ub978 \ubaa8\ub4e0 \uc810\uc758 \ubd88\uc77c\uce58 \uac01\ub3c4\uac00 \uacc4\uc0b0\ub429\ub2c8\ub2e4. \uc774 \ub3c4\ud45c\ub294 \uac00\uc7a5 \ub9ce\uc774 \ubcc0\ud615\ub41c Grain\uc744 \uba85\ud655\ud558\uac8c \ubcf4\uc5ec\uc90d\ub2c8\ub2e4. 3.3.5 \ub4f1\uac00 \ubcc0\ud615 \ub3c4\ud45c \uac01 Grain \ub0b4\uc758 \ubc29\ud5a5 \ubd84\ud3ec\ub97c \uacc4\uc0b0\ud558\uace0 Grain \ud06c\uae30\uc5d0 \ub530\ub77c \ud2b9\uc815 \uac00\uc911\uce58\ub97c \ubd80\uc5ec\ud569\ub2c8\ub2e4. \uadf8\ub7f0 \ub2e4\uc74c, \ud3c9\ud65c\ud654 \uacc4\uc218\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc804\uccb4 \uc601\uc5ed\uc758 \ub4f1\ubcc0\ud615\ub960 \ubd84\ud3ec\ub97c \ub9e4\ub044\ub7fd\uac8c \ud558\uc5ec \ub192\uc740 \ubcc0\ud615\ub960 \uc601\uc5ed\uc744 \uac15\uc870 \ud45c\uc2dc\ud569\ub2c8\ub2e4(\uadf8\ub9bc 7 \ucc38\uc870). \uadf8\ub9bc 7 \uade0\uc5f4 \uadfc\ucc98\uc758 \ubcc0\ud615\ub960 \ubd84\ud3ec3.4 \uacb0\uc815\ub9bd \uacbd\uacc4 \uc18d\uc131\uac01 \uacb0\uc815\ub9bd\uc758 \uacb0\uc815\ud559\uc801 \ubc29\ud5a5 \uacb0\uc815 , \uacb0\uc815\ub9bd \uc0ac\uc774\uc758 \ubd88\uc77c\uce58 \uac01\ub3c4\ub294 \ub300\uac01 \uacb0\uc815\ub9bd\uacc4, \uc18c\uac01 \uacb0\uc815\ub9bd\uacc4, \ud558\uc704 \uacb0\uc815\ub9bd\uacc4 \ub4f1\uc744 \uad6c\ubcc4\ud558\uae30 \uc704\ud574 \uc27d\uac8c \uacc4\uc0b0\ub420 \uc218 \uc788\uc73c\uba70 \uc77c\uce58 \uaca9\uc790 \ubaa8\ub378(CSL&#039;s)\uc5d0 \ub530\ub77c \uc5f0\uad6c\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uacb0\uc815\ub9bd\uacc4\ub294 \uc77c\uad00\ub41c \uacb0\uc815\ub9bd\uacc4\uc785\ub2c8\ub2e4. \u03a33, \u03a39, \u03a327 \ubc0f \uae30\ud0c0 \uc77c\uce58 \uaca9\uc790 \uaca9\uc790 \uacbd\uacc4\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uc30d\ub465\uc774 \uacbd\uacc4\uc785\ub2c8\ub2e4. \ub610\ud55c \ub2e4\uc591\ud55c \ubd88\uc77c\uce58 \uac01\ub3c4\ub97c \uc5f0\uad6c\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.3.5 \uaca9\uc790 \uc0c1\uc218 \uacb0\uc815 \ud0a4\ucfe0\uce58 \uc601\uc5ed\uc758 \ub108\ube44\ub97c \uce21\uc815\ud558\uc5ec \ud574\ub2f9 \uacb0\uc815\uba74\uc758 \uba74\uac04 \uac04\uaca9\uc744 \uacc4\uc0b0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uac01 Kikuchi \ubc34\ub4dc\uc758 \uac00\uc7a5\uc790\ub9ac\ub294 \ub450 \uc30d\uace1\uc120 \uace1\uc120\uacfc \ub3d9\uc77c\ud558\ubbc0\ub85c Kikuchi \ubc34\ub4dc\uc758 \ub2e4\ub978 \uc704\uce58\uc5d0\uc11c \uce21\uc815\ub41c \ub108\ube44 \uac12\uc774 \ub2e4\ub985\ub2c8\ub2e4. Kikuchi\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uacb0\uc815 \uac04\uaca9\uc744 \uacc4\uc0b0\ud558\uae30 \uc704\ud574 \ubc34\ub4dc\uc758 \uac00\uc7a5 \uc881\uc740 \ud3ed\uc5d0\uc11c \uce21\uc815\ud574\uc57c \ud569\ub2c8\ub2e4. \uce21\uc815 \uacfc\uc815\uc758 \uc624\ucc28\ub85c \uc778\ud574 EBSD\ub85c \ud3c9\uba74 \uc0ac\uc774\uc758 \uac70\ub9ac\ub97c \uce21\uc815\ud558\ub294 \uc624\ucc28\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uc57d 1.5%\uc785\ub2c8\ub2e4. \ub530\ub77c\uc11c EBSD\ub294 \uaca9\uc790 \uc0c1\uc218\ub97c \uce21\uc815\ud558\ub294 \ud2b9\ubcc4\ud55c \ubc29\ubc95\uc774 \uc544\ub2d9\ub2c8\ub2e4. \uc704\uc758 \uc6a9\ub3c4 \uc678\uc5d0\ub3c4 EBSD\ub294 \ub2e4\uc591\ud55c \uc0d8\ud50c\uc758 \uacb0\uc815\ub9bd \ubc29\ud5a5\uc744 \uc815\ud655\ud558\uac8c \uacb0\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uae08\uc18d \uc870\uc9c1\ud559\uc801 \ubc29\ubc95\uc73c\ub85c \uc2dc\ub8cc \uc785\uc790\ub97c \uacb0\uc815\ud558\uae30 \uc5b4\ub824\uc6b4 \uacbd\uc6b0 \uc2dc\ub8cc \ub0b4 \uacb0\uc815 \uc785\uc790\uc758 \uc2e4\uc81c \ubd84\ud3ec\uc640 \uc785\uc790 \ud06c\uae30\uc758 \ubd84\ud3ec\ub294 EBSD\ub97c \ud1b5\ud574 \ud655\uc778\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.4 \uacb0\ub860 \uc804\uc790 \ud6c4\ubc29 \uc0b0\ub780 \ud68c\uc808(EBSD) \uae30\uc220\uc740 \ub9e4\uc6b0 \uc131\uc219\ud558\uc5ec \ub2e4\uc74c\uc744 \uc218\ud589\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc785\uc790 \ubc29\ud5a5, \ubbf8\uc138 \uc870\uc9c1, \ubc29\ud5a5, \uc11c\uc2dd\uc9c0 \ud45c\uba74 \ubc0f \uc704\uc0c1 \uc2dd\ubcc4, \ubcc0\ud615 \ubd84\ud3ec, \uc785\uc790 \uacbd\uacc4 \ud2b9\uc131 \ubc0f \uaca9\uc790 \uc0c1\uc218 \uae30\ud0c0 \uacb0\uc815\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc77c\ubc18\uc801\uc73c\ub85c \uc0ac\uc6a9\ub418\ub294 X\uc120 \ud68c\uc808\uacfc \ube44\uad50\ud558\uc5ec TEM\uc5d0\uc11c \uc120\ud0dd\ub41c \uc804\uc790 \ud68c\uc808\uc740 \uace0\uc720\ud55c \ud2b9\uc131\uc744 \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ud2b9\ud788 \uc8fc\uc0ac\ud615 \uc804\uc790\ud604\ubbf8\uacbd\uc5d0 \uc7a5\ucc29\ud560 \uacbd\uc6b0 \ud615\ud0dc \uad00\ucc30, \uad6c\uc870 \ubd84\uc11d \ubc0f \uc131\ubd84 \uacb0\uc815(\uc5d0\ub108\uc9c0 \uc2a4\ud399\ud2b8\ub7fc \ubc0f \ubd84\uad11\ubc95 \ud3ec\ud568) \uae30\ub2a5\uc744 \ud3ec\uad04\uc801\uc778 \ubd84\uc11d \ub3c4\uad6c\ub85c \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<br \/>\n\uadfc\uc6d0 : Meeyou \ud0c4\ud654\ubb3c<\/div>\n<p><!-- .vgblk-rw-wrapper --><\/p>","protected":false},"excerpt":{"rendered":"<p>1 IntroductionThe history of electron backscatter diffraction (EBSD) should be traced back to the band-shaped diffraction pattern seen by Kikuchi in a transmission electron microscope in 1928, the Kikuchi line, although this Kikuchi line is transmitted electronically. Until 1954, Alam, Blackman, and Pashley also used transmission electron microscopy to film the wide-angle kikuchi patterns cleaving&#8230;<\/p>","protected":false},"author":1,"featured_media":1593,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_jetpack_memberships_contains_paid_content":false,"footnotes":""},"categories":[79],"tags":[],"class_list":["post-18550","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-materials-weekly"],"jetpack_featured_media_url":"https:\/\/www.meetyoucarbide.com\/wp-content\/uploads\/2019\/05\/f875f9_07ce988264184654be70d1d2201a4b55mv2.png","jetpack_sharing_enabled":true,"_links":{"self":[{"href":"https:\/\/www.meetyoucarbide.com\/ko\/wp-json\/wp\/v2\/posts\/18550","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.meetyoucarbide.com\/ko\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.meetyoucarbide.com\/ko\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.meetyoucarbide.com\/ko\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.meetyoucarbide.com\/ko\/wp-json\/wp\/v2\/comments?post=18550"}],"version-history":[{"count":0,"href":"https:\/\/www.meetyoucarbide.com\/ko\/wp-json\/wp\/v2\/posts\/18550\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.meetyoucarbide.com\/ko\/wp-json\/wp\/v2\/media\/1593"}],"wp:attachment":[{"href":"https:\/\/www.meetyoucarbide.com\/ko\/wp-json\/wp\/v2\/media?parent=18550"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.meetyoucarbide.com\/ko\/wp-json\/wp\/v2\/categories?post=18550"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.meetyoucarbide.com\/ko\/wp-json\/wp\/v2\/tags?post=18550"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}